JP2533431Y2 - Ｉｃウエーハ試験用プローブ - Google Patents

Ｉｃウエーハ試験用プローブ

Info

Publication number
JP2533431Y2
JP2533431Y2 JP1990104309U JP10430990U JP2533431Y2 JP 2533431 Y2 JP2533431 Y2 JP 2533431Y2 JP 1990104309 U JP1990104309 U JP 1990104309U JP 10430990 U JP10430990 U JP 10430990U JP 2533431 Y2 JP2533431 Y2 JP 2533431Y2
Authority
JP
Japan
Prior art keywords
contact
insulating film
wafer
wiring board
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990104309U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463135U (en]
Inventor
勝三郎 川口
忠男 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP1990104309U priority Critical patent/JP2533431Y2/ja
Publication of JPH0463135U publication Critical patent/JPH0463135U/ja
Application granted granted Critical
Publication of JP2533431Y2 publication Critical patent/JP2533431Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1990104309U 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ Expired - Lifetime JP2533431Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990104309U JP2533431Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990104309U JP2533431Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ

Publications (2)

Publication Number Publication Date
JPH0463135U JPH0463135U (en]) 1992-05-29
JP2533431Y2 true JP2533431Y2 (ja) 1997-04-23

Family

ID=31849533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990104309U Expired - Lifetime JP2533431Y2 (ja) 1990-10-03 1990-10-03 Ｉｃウエーハ試験用プローブ

Country Status (1)

Country Link
JP (1) JP2533431Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5436568A (en) * 1994-01-25 1995-07-25 Hughes Aircraft Company Pivotable self-centering elastomer pressure-wafer probe
JP7336176B2 (ja) * 2017-12-18 2023-08-31 株式会社ヨコオ 検査治具
WO2025013432A1 (ja) * 2023-07-07 2025-01-16 株式会社ブイ・テクノロジー プローブ装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4906920A (en) * 1988-10-11 1990-03-06 Hewlett-Packard Company Self-leveling membrane probe

Also Published As

Publication number Publication date
JPH0463135U (en]) 1992-05-29

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